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Efficient Automation in Semiconductor Production: Successful Implementation of a 24/7 Vacuum Chamber Control System

In the high-tech world of semiconductor production, automating complex processes presents a fundamental challenge. Given the complexity and the stringent demands for precision and reliability, advanced solutions are essential. For our client, we successfully implemented a comprehensive automation solution for the control of a 24/7 vacuum chamber. The impressive outcome of this project highlights the potential of modern automation technology in semiconductor production and reinforces our expertise as a reliable partner for complex automation projects.

The challenge

Automation of Complex Processes in Semiconductor Production

Automating manufacturing processes in semiconductor production presents high demands and requires precise, reliable solutions. The core challenge was to develop a highly complex control system for field devices, which involved managing a variety of variables and logic for operating measurements in vacuum chambers. The goal was to create an automation solution that ensures the continuous operation of approximately 500 high-performance sensors and actuators. This solution needed to integrate automated logic based on advanced algorithms and calculation models to ensure accurate control and regulation. Additionally, it was essential to efficiently manage the supply of critical systems, such as the vacuum system and load lock and door systems, with various media (e.g., helium, hydrogen, compressed air). This required a deep understanding of the specific requirements of the process industry and the ability to develop and implement complex automation functions across multiple machine modules.

The solution

Utilization of Siemens TIA Portal and SIMATIC S7-1518F for Precise Process Control and Virtual Validation

To address this challenging task, a PLC-based (Programmable Logic Controller) automation solution was implemented to manage complex algorithms, processes, and logic. PLCs are programmable controllers used for real-time digital control and regulation of machinery and systems. For this project, a solution utilizing Siemens TIA Portal and SIMATIC S7-1518F was deployed to ensure precise and reliable control of all involved components. The TIA (Totally Integrated Automation) Portal, Siemens’ engineering software, facilitated the efficient configuration and programming of the automation project. The SIMATIC S7-1518F, a powerful and safety-certified PLC, managed state monitoring, locking logic, and error handling based on a standardized and modular approach. Before the system went live, a comprehensive virtual validation was performed using Siemens SIMIT software. This simulation platform allowed for realistic testing and optimization of all control logic and processes, helping to identify and resolve potential issues early. A WinCC visualization was developed for controlling cleanroom processes, enabling seamless real-time monitoring and operation. Sensor and actuator integration was carried out according to the customer’s development framework. Special attention was given to creating a user-friendly and maintenance-friendly interface to ensure long-term operation and efficiency of the solution.

The result

Minimizing Sources of Error, Maximizing Process Stability: Successful Implementation of a Fully Automated Measurement System

The successful implementation of a fully automated process flow is characterized by its ability to operate around the clock, enabling precise measurements in semiconductor manufacturing. The challenge of developing a complex and highly variable control logic was met through the use of advanced automation technology and innovative software solutions. This project has significantly contributed to enhancing efficiency and quality in semiconductor production for our client. Virtual validation with Siemens SIMIT ensured that the system’s commissioning was not only efficient but also error-free. Potential issues were identified and resolved in advance, allowing for a smooth startup without unexpected complications. This approach reduced the overall project timeline and further increased the system’s reliability. The established solution has proven to be highly reliable, providing continuous and precise control of a complex measurement cell. Automation has led to a significant improvement in operational efficiency by minimizing human error and maximizing process stability. This project has positioned evosoft as a trusted partner for our client in developing a complete automation module with comprehensive responsibility. It also demonstrated our capability to deliver stable and consistent operation for the entire measurement system, adhering to the highest quality standards. The close collaboration between the client and technology partner played a crucial role in the project’s success. Through a shared understanding of technical requirements and goals, a solution tailored precisely to the needs of semiconductor manufacturing was achieved. The provision of a user-friendly and easily maintainable system ensures that it is not only technologically advanced but also practical for daily operations. In summary, this project represents a significant milestone in automating complex manufacturing processes in the semiconductor industry. It illustrates the effectiveness of modern automation technologies and the importance of strategic partnerships between technology providers and industry companies. The implemented solution serves as a model for similar challenges in the semiconductor industry and beyond, showcasing how innovative automation solutions can enhance efficiency, safety, and reliability in production.

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